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FE-SEM
JEOL JSM-6700F
Location: RB105, CCMS and Physics Building of NTU
Classification: Level A 50% / Level B 50%
Facility Director: Prof. Li-Chyong Chen
Instrumentation and Key capabilities:
(1) Scanning Electron Image (SEI)
(2) Back Scattering (BS)
Cathode Luminescence:
UV-Visible: 200nm ~ 900nm
IR: 800nm ~ 1700nm
Monochromator:
UV-Visible: 0nm ~ 600nm
IR: 960nm ~ 3800nm
Resolution:
UV-Visible: 0.5nm
IR: 1.2nm
Accelerating Voltage: 0.5 to 30 kV
Magnification”G x 10 to 500,000
Electron Beam Induced Current”VEBIC:
specification: Klock
version: nanoprobe
Resolution of step motor: 2 nm
Output Voltage:100mV ~11V,
Current range:0.1 mA ~1pA
 Contact information:
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