Carbon-based nanostructures

Amorphous boron carbon nitride films

   Deposition condition, composition and mechanical properties of BCN films produced by magnetron sputtering of r.f.-powered h-BN and d.c.-powered graphite targets (sputtering gas, Ar ;0.8 sccm; pressure: 3.5 mTorr)

FTIR spectra for a-B_xC_y N films, deposited at 400 8C, as a function of carbon content

Variation of hardness and elasticmodulus of a-BC_xN_y films, as a function of carbon content, deposited at 75 ^oC

Variation of hardness and elasticmodulus of a-BC_xN_y films, as a function of deposition temperature

S. C. Chien, S. Chattopadhyay, L. C. Chen, S. T. Lin and K. H. Chen, Diamond & Related Materials, 12, 1463 (2003).